Position detecting system
US4702606A · kind A · utility
Assignee
Inventors
Key dates
| Filing date | May 24, 1985 |
| Grant date | Oct 27, 1987 |
| Priority date | — |
| Expiry date | May 24, 2005 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG03F7/70358
- WIPO fieldOptics
- WIPO sectorInstruments
Abstract
An alignment system includes an element bearing a plurality of patterns on the surface thereof, the plurality of patterns being arranged in a predetermined direction, a stage for holding the element, scanning means for scanning the plurality of patterns of the element held by the stage in the predetermined direction and making position signals indicative of the positions of the plurality of patterns in the predetermined direction on the element, and operation means for operating and putting out a signal indicative of a position which is in a predetermined relation with the positions of the plurality of patterns in the predetermined direction, on the basis of the position signals.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.