Hydrocarbon-substituted analogs of phosphine and arsine, particularly for metal organic chemical vapor deposition
US4734514A · kind A · utility
Assignee
Inventors
Key dates
| Filing date | Feb 10, 1986 |
| Grant date | Mar 29, 1988 |
| Priority date | — |
| Expiry date | Feb 10, 2006 |
Classification
- Technology area (CPC C)Chemistry; Metallurgy
- CPC primaryC23C16/306
- WIPO fieldOrganic fine chemistry
- WIPO sectorChemistry
Abstract
Organometallic compounds having the formulas: ##STR1## wherein N is selected from phosphorus and arsenic, H is hydride, and X and Y are independently selected from hydride, lower alkyl cyclopentadienyl, and phenyl, except that Y cannot be hydrogen; and EQU MR.sub.x wherein x is an integer from 2 to 4 inclusive, each said R substituent is independently selected from hydride, lower alkyl, phenyl, alkyl-substituted phenyl, cyclopentadienyl, and alkyl-substituted cyclopentadienyl, and M is selected from elements of Groups 2B, 2A, 3A, 5A, and 6A of the Periodic Table, except carbon, nitrogen, oxygen, and sulfur. The use of these compounds in chemical vapor deposition processes and methods for synthesizing these compounds are also disclosed.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.