Positioning device comprising a z-manipulator and a .theta.-manipulator
US4746800A · kind A · utility
Assignees
Inventors
Key dates
| Filing date | Sep 22, 1986 |
| Grant date | May 24, 1988 |
| Priority date | — |
| Expiry date | Sep 22, 2006 |
Classification
- Technology area (CPC B)Performing Operations; Transporting
- CPC primaryB23Q1/36
- WIPO fieldMachine tools
- WIPO sectorMechanical engineering
Abstract
A positioning device for manipulation of objects, provided with an object holder (5) which is rotatable about an axis of rotation (.theta.) by means of a .theta.-manipulator and is displaceable by translation along a Z-axis coinciding with the axis of rotation (.theta.) by means of a Z-manipulator. The two manipulators are coupled to each other by means of a separator (17, 153) in such a manner that the .theta.-movement and the Z-movement are independent of each other. The positioning device is particularly suitable for manipulation of objects in the submicron range, such as takes place, for example, in optical lithographic devices according to the invention.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.