Vapor source for vacuum coating installation
US4748935A · kind A · utility
12Cited by
4References
4Claims
0Family size
Assignee
Inventor
Key dates
| Filing date | Jan 31, 1986 |
| Grant date | Jun 7, 1988 |
| Priority date | — |
| Expiry date | Jan 31, 2006 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH01J37/3053
- WIPO fieldElectrical machinery, apparatus, energy
- WIPO sectorElectrical engineering
Abstract
A vapor source for a vacuum-coating installation comprises a rotatably mounted vaporizing crucible, a drive motor and a device, preferably an electron beam gun, for heating the material to be vaporized, all arranged in one structural unit, movable as a whole in the coating installation. With this, the site of the vaporization for a given layer-thickness distribution can be selected optimally to correspond to the respective applications.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.