Urs Wegmann
13Patents
8h-index
8Co-inventors
61Inventor score
Filing activity: Oct 30, 1981 → Apr 6, 1995
Most-cited inventions
| Patent | Title | Area | Cited by | Status |
|---|---|---|---|---|
| US4448653A | Cathode arrangement for sputtering material from a target in a cathode sputtering unit | Electricity | 141 | Expired |
| US4622121A | Apparatus for coating materials by cathode sputtering | Electricity | 76 | Expired |
| US6248219A | Process and apparatus for sputter etching or sputter coating | Electricity | 42 | Expired |
| US5343112A | Cathode arrangement | Electricity | 34 | Expired |
| US4983269A | Method for erosion detection of a sputtering target and target arrangement | Chemistry; Metallurgy | 30 | Expired |
| US5159234A | Electron beam generator and emission cathode | Electricity | 13 | Expired |
| US4748935A | Vapor source for vacuum coating installation | Electricity | 12 | Expired |
| US5039913A | Method for the cooling of targets as well as cooling device for targets | Electricity | 8 | Expired |
| US5277938A | Method for controlling evaporation for vapor deposition | Chemistry; Metallurgy | 8 | Expired |
| US5003151A | Method and control arrangement for the evaporation rate of an electron beam | Electricity | 3 | Expired |
| US5021669A | Process and system for the control of the focusing of a beam of monopolar charged particles | Electricity | 1 | Expired |
| US5038044A | Method and device for the deflection of a beam | Electricity | 1 | Expired |
| US5041712A | Method for the control of an evaporation process | Electricity | 0 | Expired |
Source: USPTO / EPO open patent data. Inventor disambiguation is heuristic; counts are objective bibliographic measures.