Illumination optical system
US4769750A · kind A · utility
96Cited by
10References
11Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Oct 14, 1986 |
| Grant date | Sep 6, 1988 |
| Priority date | — |
| Expiry date | Oct 14, 2006 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG03F7/70058
- WIPO fieldOptics
- WIPO sectorInstruments
Abstract
An illumination optical system comprises a multi-beam generator which includes a plurality of each of two kinds of lens elements different in optical characteristics and which is interposed between a source for generating a collimated light beam and a light condenser. The multi-beam generator generates a large number of secondary light sources from the collimated light beam. The illumination optical system is capable of supplying illuminating light rays having an extremely uniform illumination distribution.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.