Multiple density mask and fabrication thereof
US4770947A · kind A · utility
5Cited by
4References
9Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Jan 2, 1987 |
| Grant date | Sep 13, 1988 |
| Priority date | — |
| Expiry date | Jan 2, 2007 |
Classification
- Technology area (CPC Y)Emerging Cross-Sectional Technologies
- CPC primaryY10T428/12944
- WIPO fieldOptics
- WIPO sectorInstruments
Abstract
A multi-layer structure that includes a transparent dielectric substrate, a layer of a nickel-containing steel alloy, and a layer of copper and/or chrome.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.