Vacuum chamber slit valve
US4785962A · kind A · utility
Assignee
Inventor
Key dates
| Filing date | Apr 20, 1987 |
| Grant date | Nov 22, 1988 |
| Priority date | — |
| Expiry date | Apr 20, 2007 |
Classification
- Technology area (CPC Y)Emerging Cross-Sectional Technologies
- CPC primaryY10S414/139
- WIPO fieldMechanical elements
- WIPO sectorMechanical engineering
Abstract
A slit valve for sealing an access opening in a vacuum chamber. The slit valve body or door is pivotally mounted adjacent the opening and has a pair of cam blocks mounted at its opposite ends. Cam follower rollers are mounted on a swing arm for reversible pivotal door opening and closing movement effected by a pneumatic cylinder. During closing movement of the swing arm, the cam followers engage the cam block and resiliently pivot the slit valve against the opening. Upon reversed, pivotal opening movement, the cam followers release from the cam block, allowing a spring to return the door to a normally opened position. The slit valve mounting is adapted to provide equal compressive sealing, both top-to-bottom and side-to-side.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.