System and method for detecting the center of an integrated circuit wafer
US4819167A · kind A · utility
192Cited by
6References
10Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Apr 20, 1987 |
| Grant date | Apr 4, 1989 |
| Priority date | — |
| Expiry date | Apr 20, 2007 |
Classification
- Technology area (CPC Y)Emerging Cross-Sectional Technologies
- CPC primaryY10S414/137
- WIPO fieldSemiconductors
- WIPO sectorElectrical engineering
Abstract
A system and method for determining the precise location of a moving object such as a semiconductor wafer relative to a destination position, using an array of optical sensors positioned along an axis generally transverse to the path of movement of the wafer. The sensor trigger points along the path of movement are used to calculate the center position of the wafer relative to the destination position.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.