Controlled furnace heat treatment
US4820907A · kind A · utility
Assignee
Inventors
Key dates
| Filing date | Dec 11, 1987 |
| Grant date | Apr 11, 1989 |
| Priority date | — |
| Expiry date | Dec 11, 2007 |
Classification
- Technology area (CPC F)Mechanical Engineering; Lighting; Heating
- CPC primaryF27B17/0025
- WIPO fieldThermal processes and apparatus
- WIPO sectorMechanical engineering
Abstract
The present invention is directed to a heat treatment apparatus for performing heat treatment of a substrate. According to the present invention, a thermocouple is introduced into a heating furnace and discharged from the heating furnace by carrier means in such a state that one side ends of the wires forming thermocouple are connected to the substrate and another ends of the wires forming the thermocouple are connected to fixed terminals of a terminal mount. Movable terminals of a terminal driving mechanism are brought into contact with the fixed terminals of the terminal mount, to outwardly extract output signals of the thermocouple. Thus, temperatures of the temperature measuring substrate can be accurately measured while securing air-tightness in the heating furnace. Further, entanglement of metal wires forming the thermocouple is prevented in introduction/discharging of the substrate.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.