Positioning device for a scanning tunneling microscope
US4871938A · kind A · utility
Assignee
Inventors
Key dates
| Filing date | Jun 13, 1988 |
| Grant date | Oct 3, 1989 |
| Priority date | — |
| Expiry date | Jun 13, 2008 |
Classification
- Technology area (CPC Y)Emerging Cross-Sectional Technologies
- CPC primaryY10S977/872
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
A piezoelectric positioning device for controlling the three dimensional horizontal and vertical movement of a tip relative to the sample in a scanning tunneling microscope. A thin walled cone or cylinder shaped member formed of piezoelectric material having an outer surface and an inner surface. A tip member positioned at the bottom of the cone or cylindrical member. A plurality of substantially similar electrode members positioned around one of the surfaces of the cone or cylinder shaped member to form opposite pairs of electrodes to control the horizontal movement of the tip in two of the three dimensions in accordance with voltages applied to the pairs of electrodes. A unitary member positioned around the other of the surfaces of the cone or cylinder shaped member to form a unitary electrode to control the vertical movement of the tip in the third dimension in accordance with voltage applied to the unitary electrode.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.