Light filters for microelectronics
US4876165A · kind A · utility
44Cited by
1References
15Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Jan 12, 1987 |
| Grant date | Oct 24, 1989 |
| Priority date | — |
| Expiry date | Jan 12, 2007 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH01L21/0276
- WIPO fieldOptics
- WIPO sectorInstruments
Abstract
Filters suitable for microelectronic uses and the like may be prepared directly on substrates either as monolithically integrated filters or as hybrid filters using a soluble dye material in a resin. The resin may be applied to microelectronic substrates and patterned by conventional microphotolithographic processes.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.