Fine adjustment mechanism for a scanning tunneling microscope
US4880975A · kind A · utility
Assignee
Inventors
Key dates
| Filing date | Aug 9, 1988 |
| Grant date | Nov 14, 1989 |
| Priority date | — |
| Expiry date | Aug 9, 2008 |
Classification
- Technology area (CPC Y)Emerging Cross-Sectional Technologies
- CPC primaryY10S977/861
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
A fine adjustment mechanism for a scanning tunneling microscope includes a mounting member, a cylindrical piezoelectric element fixed to the mounting member at one end thereof, an electrode provided on each of the inner and outer walls of the piezoelectric element, a probe provided on the other end of the piezoelectric element in such a manner that it extends outward on the central axis of the piezoelectric element, an electrically conductive member provided on the central axis of the piezoelectric element, one end of the conductive member being electrically connected to the probe within the piezoelectric element and the other end thereof extending to the outside of the piezoelectric element through the side of the piezoelectric element at which it is fixed to the mounting member, and shielding member provided on the outer periphery of the conductive member for electrically shielding the conductive member.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.