Treating method
US4913790A · kind A · utility
Assignee
Inventors
Key dates
| Filing date | Mar 21, 1989 |
| Grant date | Apr 3, 1990 |
| Priority date | — |
| Expiry date | Mar 21, 2009 |
Classification
- Technology area (CPC C)Chemistry; Metallurgy
- CPC primaryC23C16/481
- WIPO fieldSurface technology, coating
- WIPO sectorChemistry
Abstract
A workpiece treating method includes a temperature rise step in which first temperature control is performed and a treatment step in which second temperature control is performed and is adapted to treat a workpiece whose emissivity of infrared rays in the temperature rise step is different from that in the treatment step. In the temperature rise step, the temperature of the workpiece is detected by a non-contact type temperature detecting means so as to perform the first temperature control. In the treatment step, the temperature of the workpiece is detected by a contact type temperature detecting means so as to perform the second temperature control.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.