Fine adjustment mechanism for a scanning tunneling microscope
US4945235A · kind A · utility
18Cited by
1References
14Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Aug 19, 1988 |
| Grant date | Jul 31, 1990 |
| Priority date | — |
| Expiry date | Aug 19, 2008 |
Classification
- Technology area (CPC Y)Emerging Cross-Sectional Technologies
- CPC primaryY10S977/872
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
A fine adjustment mechanism for a scanning tunneling microscope includes a mounting member, a cylindrical piezoelectric element fixed to the mounting member at one end of the element, a probe provided at the other end of the piezoelectric element, and electrodes disposed on the inner and outer walls of the piezoelectric element, one of the electrodes being divided into a plurality of electrode groups in the longitudinal direction of the piezoelectric element.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.