Tunnel unit and scanning head for scanning tunneling microscope
US4947042A · kind A · utility
Assignee
Inventors
Key dates
| Filing date | Jun 14, 1989 |
| Grant date | Aug 7, 1990 |
| Priority date | — |
| Expiry date | Jun 14, 2009 |
Classification
- Technology area (CPC Y)Emerging Cross-Sectional Technologies
- CPC primaryY10S977/86
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
A tunnel unit for a scanning tunneling microscope includes a specimen stage having a plurality of pole pieces joined together via a joint member formed of a non-magnetic material and a specimen placing surface where the pole pieces and the joint member are exposed, a permanent magnet rotatably inserted within the specimen stage and at the joint of the plurality of pole pieces, a scanning head main body, which is provided with a piezoelectric element fixed thereto and a probe mounted on the piezoelectric element, being disposed above the specimen placing surface of the specimen stage and extending across the exposed joint member, and three screws formed of a magnetic material and rotatably mounted on the scanning head main body, the screws having their end portions in contact with the specimen placing surface of the specimen stage for supporting the scanning head main body above the specimen placing surface.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.