Apparatus for purifying arsine, phosphine, ammonia, and inert gases to remove Lewis acid and oxidant impurities therefrom
US4983363A · kind A · utility
12Cited by
14References
19Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Mar 3, 1988 |
| Grant date | Jan 8, 1991 |
| Priority date | — |
| Expiry date | Mar 3, 2008 |
Classification
- Technology area (CPC C)Chemistry; Metallurgy
- CPC primaryC01B25/06
- WIPO fieldChemical engineering
- WIPO sectorChemistry
Abstract
An apparatus for purifying a gaseous mixture comprising arsine, phosphine, ammonia, and/or inert gases, to remove Lewis acid and/or oxidant impurities therefrom, comprising a vessel containing a bed of a scavenger, the scavenger including a support having associated therewith an anion which is effective to remove such impurities, such anion being selected from one or more members of the group consisting of: (i) carbanions whose corresponding protonated compounds have a pK.sub.a value of from about 22 to about 36; and (ii) anions formed by reaction of such carbanions with the primary component of the mixture.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.