Rotary wafer drier
US4987687A · kind A · utility
28Cited by
3References
8Claims
0Family size
Assignee
Inventor
Key dates
| Filing date | Sep 27, 1989 |
| Grant date | Jan 29, 1991 |
| Priority date | — |
| Expiry date | Sep 27, 2009 |
Classification
- Technology area (CPC F)Mechanical Engineering; Lighting; Heating
- CPC primaryF26B5/08
- WIPO fieldChemical engineering
- WIPO sectorChemistry
Abstract
A rotary wafer drying apparatus comprises a rotatable rotor for applying centrifugal force to the wafers, and a motor for rotating the rotor. A pair of cradles, attached to the rotor, receive a plurality of wafers arranged vertically. When the wafers are to be dried, the cradles are rotated by about 90.degree. from the state of reception, with the wafers maintained approximately at the horizontal state. When wafers of different diameters are to be dried and the size of the cradles should be changed correspondingly, not the rotor itself but only the pair of cradles in the rotor are changed.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.