Kenji Sugimoto
52Patents
20h-index
90Co-inventors
91Inventor score
Filing activity: Jul 3, 1975 → Sep 7, 2022
Most-cited inventions
| Patent | Title | Area | Cited by | Status |
|---|---|---|---|---|
| US5678116A | Method and apparatus for drying a substrate having a resist film with a miniaturized pattern | Physics | 121 | Expired |
| US4870923A | Apparatus for treating the surfaces of wafers | Chemistry; Metallurgy | 93 | Expired |
| US5224595A | Package of cement mixing material | Emerging Cross-Sectional Technologies | 71 | Expired |
| US5030282A | Carbon fiber-reinforced cementitious composite and method for producing the composite | Emerging Cross-Sectional Technologies | 70 | Expired |
| US5386670A | Method for manufacturing system floor and floor base for system floor | Fixed Constructions | 67 | Expired |
| US6893171B2 | Substrate treating apparatus | Emerging Cross-Sectional Technologies | 63 | Expired |
| US5180431A | Apparatus for applying liquid agent on surface of rotating substrate | Performing Operations; Transporting | 54 | Expired |
| US5555234A | Developing method and apparatus | Physics | 43 | Expired |
| US5677000A | Substrate spin treating method and apparatus | Physics | 43 | Expired |
| US5762709A | Substrate spin coating apparatus | Performing Operations; Transporting | 40 | Expired |
| US4413539A | Numerically controlled lathe | Emerging Cross-Sectional Technologies | 38 | Expired |
| US5639301A | Processing apparatus having parts for thermal and non-thermal treatment of substrates | Emerging Cross-Sectional Technologies | 37 | Expired |
| US6558053B2 | Substrate processing apparatus | Electricity | 36 | Expired |
| US5191908A | Dipping type surface treatment apparatus | Emerging Cross-Sectional Technologies | 33 | Expired |
| US6832863B2 | Substrate treating apparatus and method | Emerging Cross-Sectional Technologies | 32 | Expired |
| US4987687A | Rotary wafer drier | Mechanical Engineering; Lighting; Heating | 28 | Expired |
| US4213926A | Method for making a decorative plate used in a building | Emerging Cross-Sectional Technologies | 28 | Expired |
| US5647083A | Apparatus for cleaning substrates and methods for attaching/detaching and cleaning brushes of such apparatus | Performing Operations; Transporting | 26 | Expired |
| US5788773A | Substrate spin treating method and apparatus | Emerging Cross-Sectional Technologies | 24 | Expired |
| US4841624A | Method of producing a thin film magnetic head | Emerging Cross-Sectional Technologies | 23 | Expired |
| US5556539A | Apparatus for separating a liquid mixture by pervaporation | Performing Operations; Transporting | 20 | Expired |
| US4087890A | Compound lathe | Emerging Cross-Sectional Technologies | 19 | Expired |
| US6000862A | Substrate developing method and apparatus | Physics | 19 | Expired |
| US4831906A | Numerical control machine | Emerging Cross-Sectional Technologies | 18 | Expired |
| US4269869A | Method for improving surface properties of porous inorganic material by coating | Chemistry; Metallurgy | 18 | Expired |
Source: USPTO / EPO open patent data. Inventor disambiguation is heuristic; counts are objective bibliographic measures.