Inventor · Kyoto, JP

Kenji Sugimoto

52Patents
20h-index
90Co-inventors
91Inventor score

Filing activity: Jul 3, 1975 → Sep 7, 2022

Most-cited inventions

PatentTitleAreaCited byStatus
US5678116A Method and apparatus for drying a substrate having a resist film with a miniaturized pattern Physics 121 Expired
US4870923A Apparatus for treating the surfaces of wafers Chemistry; Metallurgy 93 Expired
US5224595A Package of cement mixing material Emerging Cross-Sectional Technologies 71 Expired
US5030282A Carbon fiber-reinforced cementitious composite and method for producing the composite Emerging Cross-Sectional Technologies 70 Expired
US5386670A Method for manufacturing system floor and floor base for system floor Fixed Constructions 67 Expired
US6893171B2 Substrate treating apparatus Emerging Cross-Sectional Technologies 63 Expired
US5180431A Apparatus for applying liquid agent on surface of rotating substrate Performing Operations; Transporting 54 Expired
US5555234A Developing method and apparatus Physics 43 Expired
US5677000A Substrate spin treating method and apparatus Physics 43 Expired
US5762709A Substrate spin coating apparatus Performing Operations; Transporting 40 Expired
US4413539A Numerically controlled lathe Emerging Cross-Sectional Technologies 38 Expired
US5639301A Processing apparatus having parts for thermal and non-thermal treatment of substrates Emerging Cross-Sectional Technologies 37 Expired
US6558053B2 Substrate processing apparatus Electricity 36 Expired
US5191908A Dipping type surface treatment apparatus Emerging Cross-Sectional Technologies 33 Expired
US6832863B2 Substrate treating apparatus and method Emerging Cross-Sectional Technologies 32 Expired
US4987687A Rotary wafer drier Mechanical Engineering; Lighting; Heating 28 Expired
US4213926A Method for making a decorative plate used in a building Emerging Cross-Sectional Technologies 28 Expired
US5647083A Apparatus for cleaning substrates and methods for attaching/detaching and cleaning brushes of such apparatus Performing Operations; Transporting 26 Expired
US5788773A Substrate spin treating method and apparatus Emerging Cross-Sectional Technologies 24 Expired
US4841624A Method of producing a thin film magnetic head Emerging Cross-Sectional Technologies 23 Expired
US5556539A Apparatus for separating a liquid mixture by pervaporation Performing Operations; Transporting 20 Expired
US4087890A Compound lathe Emerging Cross-Sectional Technologies 19 Expired
US6000862A Substrate developing method and apparatus Physics 19 Expired
US4831906A Numerical control machine Emerging Cross-Sectional Technologies 18 Expired
US4269869A Method for improving surface properties of porous inorganic material by coating Chemistry; Metallurgy 18 Expired

Source: USPTO / EPO open patent data. Inventor disambiguation is heuristic; counts are objective bibliographic measures.