Compact atomic force microscope
US5025658A · kind A · utility
70Cited by
5References
32Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Nov 28, 1989 |
| Grant date | Jun 25, 1991 |
| Priority date | — |
| Expiry date | Nov 28, 2009 |
Classification
- Technology area (CPC Y)Emerging Cross-Sectional Technologies
- CPC primaryY10S977/87
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
This is an atomic force microscope in which the sensor can be built as a very small integrated structure. The sensor utilizes optical interference and can be operated in either the contact mode for high resolution or in the non-contact mode to measure electric and magnetic fields. One configuration of this microscope is a stand-alone configuration in which the microscope can be placed on or be suspended above large samples for sanning of small local areas thereof. The sensor is built into a scanner so that the sensor can be scanned over a stationary sample.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.