Method for the control of an evaporation process
US5041712A · kind A · utility
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6References
47Claims
0Family size
Assignee
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Key dates
| Filing date | Jun 26, 1990 |
| Grant date | Aug 20, 1991 |
| Priority date | — |
| Expiry date | Jun 26, 2010 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH01J37/302
- WIPO fieldElectrical machinery, apparatus, energy
- WIPO sectorElectrical engineering
Abstract
A method and apparatus for controlling, regulating and measuirng the particle mass which is evaporated per unit time from a target by a charged particle beam, in particular an electron beam, comprises the varying of an impingement area of the beam on the target in a manner which is decoupled from control of the position of the impingement area and control of the mass current of the beam. The impingment area may be modulated for varying the particle mass and the particle mass can be measured by also using a modulation step in conjunction with a particle detector and a beam modulation step.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.