Handling apparatus for transferring a semiconductor wafer or LCD
US5049029A · kind A · utility
Assignee
Inventors
Key dates
| Filing date | Apr 9, 1990 |
| Grant date | Sep 17, 1991 |
| Priority date | — |
| Expiry date | Apr 9, 2010 |
Classification
- Technology area (CPC Y)Emerging Cross-Sectional Technologies
- CPC primaryY10S414/139
- WIPO fieldHandling
- WIPO sectorMechanical engineering
Abstract
A handling apparatus includes a base member having a rotating shaft, of a multijoint arm having one end portion thereof connected to the rotating shaft, a holder mounted at the free end portion of the arm, for holding a wafer, a stepping motor for circling the holder together with the arm about the rotating shaft, and another stepping motor for pivoting the arm joints. The multijoint arm is constituted by a plurality of parallel crank mechanisms arranged on corresponding planes in parallel with the circulating plane. One of the links constituting the first-stage parallel crank mechanism is fixed on the base member. During nonuse of the apparatus, the respective parallel crank mechanism overlap each other on the base member. Pulleys are mounted on joints of the arm, and a wire is wrapped around the pulleys. When at least one of the pulleys is pivoted, the parallel crank mechanisms are displaced, thereby extending or retracting the arm.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.