Apparatus for transporting substrates in a vacuum coating system

US5097794A · kind A · utility

Assignee

• Leybold GmBH · DE

Inventors

• Peter Mahler · Obertshausen, DE
• Klaus Michael · Gelnhausen, DE
• Rainer Gegenwart · Rödermark, DE
• Michael Scherer · Crimmitschau, DE

Key dates

• Filing date: Nov 21, 1990
• Grant date: Mar 24, 1992
• Expiry date: Nov 21, 2010

Classification

• Technology area (CPC H): Electricity
• CPC primary: H01L21/67712
• WIPO field: Surface technology, coating
• WIPO sector: Chemistry

Abstract

In a device for transporting substrates in vacuum coating systems with several stations, comprising several substrate holders 16 of plate-like configurations which can e moved across the stations along a prescribed path of transportation in a vertical position and which interact with rails 13, 14 being provided in the area of their foot part 15 below the substrates 22, 23 to be mounted to the substrate holders 16, the foot part 15 of the substrate holder 16 has a pair of rails 13, 14 spaced parallel apart and disposed in a vertical plane. The smaller sides thereof, which face one another, have longitudinal grooves 13a, 14 which correspond with rollers 7, 8 or sliding pads being disposed stationary on the bottom part of the device and being provided in rows corresponding to the course of the grooves and in planes that are on top of each other and spaced vertically apart. The substrate holder 16 has a shaft-like recess 24 which extends from the top downward into the area of the foot part 15 parallel to the rails and into which, while passing the station, extends a flat heating device 11 extending vertically toward the bottom and disposed above the substrate holder 16 at the top wall …