Method of image enhancement for the coherence probe microscope with applications to integrated circuit metrology
US5112129A · kind A · utility
194Cited by
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14Claims
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Key dates
| Filing date | Mar 2, 1990 |
| Grant date | May 12, 1992 |
| Priority date | — |
| Expiry date | Mar 2, 2010 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG01B11/02
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
A method whereby the image produced in a coherence probe microscope is modified by means of a certain specific additive electronic transformation for the purpose of improving the measurement of selected features. The technique improves measurement accuracy on optically complex materials, in particular it improves the accuracy of linewidth measurement on semiconductor linewidths.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.