Method and means for co-sintering ceramic/metal MLC substrates

US5130067A · kind A · utility

Assignee

• International Business Machines Corporation · US

Inventors

• Philip L. Flaitz · Newburgh, US
• Arlyne M. Flanagan · Staatsburg, US
• Joseph M. Harvilchuck · Billings, US
• Lester W. Herron · New Paltz, US
• John U. Knickerbocker · Wappingers Falls, US
• Robert W. Nufer · Hopewell Junction, US
• Charles H. Perry · Poughkeepsie, US
• Srinivasa N. Reddy · Lagrangeville, US
• Steven P. Young · Boulder, US

Key dates

• Filing date: May 2, 1986
• Grant date: Jul 14, 1992
• Expiry date: May 2, 2006

Classification

• Technology area (CPC H): Electricity
• CPC primary: H01L21/4807
• WIPO field: Materials, metallurgy
• WIPO sector: Chemistry

Abstract

A method for co-sintering ceramic/metal multi-layered ceramic substrates wherein X-Y shrinkage is controlled and X-Y distortion and Z-direction chamber are substantially eliminated. Binder-burnoff is substantially not aggravated during this process as well. The process is accomplished by applying selective forces to the surfaces of the ceramic substrates to control lateral movement while allowing Z direction shrinkage movement. Frictional force means, pneumatic forced means and weights are among the means used to supply forces. Cerium oxide is used in certain embodiments to enhance binder-burnoff.