Patent · US Expired

Holographic lithography

US5142385A · kind A · utility

54Cited by

8References

12Claims

0Family size

Assignee

Massachusetts Institute of Technology · US

Inventors

Erik H. Anderson · Corona, US
Henry I. Smith · Sudbury, US
Mark Schattenburg · Wayland, US

Key dates

Filing date	Jan 9, 1991
Grant date	Aug 25, 1992
Priority date	—
Expiry date	Jan 9, 2011

Classification

Technology area (CPC G)Physics
CPC primaryG03H2001/0489
WIPO fieldOptics
WIPO sectorInstruments

Abstract

First and second coherent beams illuminate a common area on an exposure station. A phase detector senses the relative phase between the first and second beams to provide a control signal. There is at least one phase shifter in the path of at least one of the coherent beams. The control signal is coupled to the phase shifter to adjust the phase imparted thereby so that the relative phase between the first and second coherent beams is substantially constant.

Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.