Inventor · Sudbury, MA, US

Henry I. Smith

52Patents
19h-index
50Co-inventors
87Inventor score

Filing activity: Oct 14, 1975 → May 23, 2016

Most-cited inventions

PatentTitleAreaCited byStatus
US5915051A Wavelength-selective optical add/drop switch Physics 214 Expired
US5414514A On-axis interferometric alignment of plates using the spatial phase of interference patterns Electricity 168 Expired
US4200395A Alignment of diffraction gratings Physics 135 Expired
US5808742A Optical alignment apparatus having multiple parallel alignment marks Physics 114 Expired
US4890309A Lithography mask with a .pi.-phase shifting attenuator Physics 104 Expired
US4360586A Spatial period division exposing Physics 69 Expired
US5900637A Maskless lithography using a multiplexed array of fresnel zone plates Physics 67 Expired
US6088103A Optical interference alignment and gapping apparatus Physics 62 Expired
US4256787A Orientation of ordered liquids and their use in devices Emerging Cross-Sectional Technologies 58 Expired
US5142385A Holographic lithography Physics 54 Expired
US6522411B1 Optical gap measuring apparatus and method having two-dimensional grating mark with chirp in one direction Physics 52 Expired
US4340305A Plate aligning Physics 44 Expired
US5014360A Removing perspiration Emerging Cross-Sectional Technologies 38 Expired
US4479846A Method of entraining dislocations and other crystalline defects in heated film contacting patterned region Emerging Cross-Sectional Technologies 32 Expired
US4370194A Orientation of ordered liquids and their use in devices Emerging Cross-Sectional Technologies 27 Expired
US5136169A Energy beam locating Electricity 26 Expired
US4333792A Enhancing epitaxy and preferred orientation Emerging Cross-Sectional Technologies 23 Expired
US5892230A Scintillating fiducial patterns Electricity 20 Expired
US5122223A Graphoepitaxy using energy beams Emerging Cross-Sectional Technologies 20 Expired
US7150910B2 Nanocrystal structures Emerging Cross-Sectional Technologies 18 Expired
US3984680A Soft X-ray mask alignment system Emerging Cross-Sectional Technologies 18 Expired
US4254174A Supported membrane composite structure and its method of manufacture Emerging Cross-Sectional Technologies 18 Expired
US7193782B2 System and method for manipulating micro-particles using electromagnetic fields Emerging Cross-Sectional Technologies 15 Expired
US5809103A X-ray lithography masking Physics 14 Expired
US4170512A Method of manufacture of a soft-X-ray mask Physics 12 Expired

Source: USPTO / EPO open patent data. Inventor disambiguation is heuristic; counts are objective bibliographic measures.