Scanning force microscope having aligning and adjusting means
US5157251A · kind A · utility
Assignee
Inventors
Key dates
| Filing date | Mar 13, 1991 |
| Grant date | Oct 20, 1992 |
| Priority date | — |
| Expiry date | Mar 13, 2011 |
Classification
- Technology area (CPC Y)Emerging Cross-Sectional Technologies
- CPC primaryY10S977/868
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
A scanning force microscope having a sensor head and a base wherein a moveable sample holder is housed in the base and is positioned relative to a probe housed in the sensor head, such sample being monitored by an optical deflection detection system. The detection system is configured to provide direct visual observation of the probe with respect to the sample. The mirror of the detection system is mounted in a cut away portion of a sphere and defines the axis of rotation of a kinematic mount, such providing ease of fine adjustment of the detection system. The sensor head is in communication with the base by a stage kinematic mount, such providing ease of position adjustment of the sensor head with respect to the base.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.