Michael D. Kirk
23Patents
13h-index
27Co-inventors
81Inventor score
Filing activity: Mar 13, 1991 → Mar 18, 2019
Most-cited inventions
| Patent | Title | Area | Cited by | Status |
|---|---|---|---|---|
| US5376790A | Scanning probe microscope | Emerging Cross-Sectional Technologies | 139 | Expired |
| US5672816A | Large stage system for scanning probe microscopes and other instruments | Emerging Cross-Sectional Technologies | 125 | Expired |
| US5444244A | Piezoresistive cantilever with integral tip for scanning probe microscope | Emerging Cross-Sectional Technologies | 62 | Expired |
| US5157251A | Scanning force microscope having aligning and adjusting means | Emerging Cross-Sectional Technologies | 48 | Expired |
| US5811821A | Single axis vibration reducing system | Emerging Cross-Sectional Technologies | 37 | Expired |
| US5496999A | Scanning probe microscope | Emerging Cross-Sectional Technologies | 34 | Expired |
| US6310342A | Optical microscope stage for scanning probe microscope | Emerging Cross-Sectional Technologies | 33 | Expired |
| US5939719A | Scanning probe microscope with scan correction | Emerging Cross-Sectional Technologies | 24 | Expired |
| US6057546A | Kinematically mounted probe holder for scanning probe microscope | Emerging Cross-Sectional Technologies | 20 | Expired |
| US5854487A | Scanning probe microscope providing unobstructed top down and bottom up views | Emerging Cross-Sectional Technologies | 20 | Expired |
| USRE35514E | Scanning force microscope having aligning and adjusting means | General | 16 | Expired |
| US7373277B1 | Methods and systems for detection of selected defects particularly in relatively noisy inspection data | Physics | 16 | Expired |
| US6130427A | Scanning probe microscope with multimode head | Emerging Cross-Sectional Technologies | 13 | Expired |
| US9355440B1 | Detection of selected defects in relatively noisy inspection data | Physics | 11 | Active |
| US9430593B2 | System and method to emulate finite element model based prediction of in-plane distortions due to semiconductor wafer chucking | Electricity | 9 | Active |
| US8284394B2 | Methods and systems for determining a characteristic of a wafer | Physics | 9 | Active |
| US8422010B2 | Methods and systems for determining a characteristic of a wafer | Physics | 9 | Active |
| US10025894B2 | System and method to emulate finite element model based prediction of in-plane distortions due to semiconductor wafer chucking | Electricity | 6 | Active |
| US7711521B1 | Methods and systems for detection of selected defects particularly in relatively noisy inspection data | Physics | 3 | Active |
| US10234402B2 | Systems and methods for defect material classification | Physics | 3 | Active |
| US7796805B1 | Defect detection | Physics | 1 | Active |
| US10670537B2 | Systems and methods for defect material classification | Physics | 0 | Active |
| US9646379B1 | Detection of selected defects in relatively noisy inspection data | Physics | 0 | Active |
Source: USPTO / EPO open patent data. Inventor disambiguation is heuristic; counts are objective bibliographic measures.