Process for etching semiconductor devices
US5185058A · kind A · utility
Assignee
Inventor
Key dates
| Filing date | Jan 29, 1991 |
| Grant date | Feb 9, 1993 |
| Priority date | — |
| Expiry date | Jan 29, 2011 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH01L21/32136
- WIPO fieldSemiconductors
- WIPO sectorElectrical engineering
Abstract
The subject invention is directed to a process for etching a semiconductor device to form a predetermined etched pattern therein. The semiconductor device which is provided herein typically has a plurality of layers. At least one of these layers comprises a metal-containing material having a metal content of at least about 80% by weight. Etching the semiconductor device with an etchant material forms a predetermined etched pattern therein. This pattern includes the formation of horizontal and upright sidewalls in the etched layers which comprise the metal-containing material. Thus, each of the upright sidewalls has a profile which is either substantially vertically sloped or is positively sloped. This is the case even though the chemical etchant composition, when employed by itself to etch the above-described metal-containing layers, forms sidewall profiles which are substantially negatively sloped configuration. The etchant material employed herein comprises a chemical etchant composition and a coating composition. In one preferred form of this invention the coating composition comprises a gaseous oxide of carbon, particularly carbon monoxide or carbon dioxide, and a silicon-conta…
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.