David A. Cathey
199Patents
36h-index
63Co-inventors
93Inventor score
Filing activity: Jul 18, 1988 → Aug 14, 2015
Most-cited inventions
| Patent | Title | Area | Cited by | Status |
|---|---|---|---|---|
| US5328810A | Method for reducing, by a factor or 2.sup.-N, the minimum masking pitch of a photolithographic process | Emerging Cross-Sectional Technologies | 1,035 | Expired |
| US5229331A | Method to form self-aligned gate structures around cold cathode emitter tips using chemical mechanical polishing technology | Electricity | 286 | Expired |
| US5300463A | Method of selectively etching silicon dioxide dielectric layers on semiconductor wafers | Electricity | 267 | Expired |
| US5232549A | Spacers for field emission display fabricated via self-aligned high energy ablation | Electricity | 175 | Expired |
| US5358601A | Process for isotropically etching semiconductor devices | Electricity | 167 | Expired |
| US5186670A | Method to form self-aligned gate structures and focus rings | Electricity | 160 | Expired |
| US5151168A | Process for metallizing integrated circuits with electrolytically-deposited copper | Electricity | 158 | Expired |
| US5372973A | Method to form self-aligned gate structures around cold cathode emitter tips using chemical mechanical polishing technology | Electricity | 147 | Expired |
| US5205770A | Method to form high aspect ratio supports (spacers) for field emission display using micro-saw technology | Electricity | 124 | Expired |
| US5409563A | Method for etching high aspect ratio features | Electricity | 124 | Expired |
| US6864927B1 | Head up display with adjustable transparency screen | Physics | 118 | Expired |
| US5391259A | Method for forming a substantially uniform array of sharp tips | Electricity | 112 | Expired |
| US5329207A | Field emission structures produced on macro-grain polysilicon substrates | Electricity | 95 | Expired |
| US5259799A | Method to form self-aligned gate structures and focus rings | Electricity | 91 | Expired |
| US5585301A | Method for forming high resistance resistors for limiting cathode current in field emission displays | Electricity | 81 | Expired |
| US5240871A | Corrugated storage contact capacitor and method for forming a corrugated storage contact capacitor | Electricity | 74 | Expired |
| US7129930B1 | Cordless computer keyboard with illuminated keys | Electricity | 68 | Expired |
| US5185058A | Process for etching semiconductor devices | Electricity | 67 | Expired |
| US5486126A | Spacers for large area displays | Emerging Cross-Sectional Technologies | 65 | Expired |
| US5096536A | Method and apparatus useful in the plasma etching of semiconductor materials | Electricity | 60 | Expired |
| US5653619A | Method to form self-aligned gate structures and focus rings | Electricity | 59 | Expired |
| US5766829A | Method of phase shift lithography | Physics | 56 | Expired |
| US5194346A | Method of fabricating phase shifting reticles with an accurate phase shift layer | Physics | 56 | Expired |
| US5281500A | Method of preventing null formation in phase shifted photomasks | Physics | 55 | Expired |
| US5342477A | Low resistance electrodes useful in flat panel displays | Electricity | 52 | Expired |
Source: USPTO / EPO open patent data. Inventor disambiguation is heuristic; counts are objective bibliographic measures.