Cleaning device
US5188136A · kind A · utility
Assignee
Inventor
Key dates
| Filing date | Nov 15, 1991 |
| Grant date | Feb 23, 1993 |
| Priority date | — |
| Expiry date | Nov 15, 2011 |
Classification
- Technology area (CPC Y)Emerging Cross-Sectional Technologies
- CPC primaryY10S134/902
- WIPO fieldChemical engineering
- WIPO sectorChemistry
Abstract
A cleaning device in the present invention comprises cleaning chambers each for cleaning subjects to be cleaned, transport units for transporting the subjects, transport chambers each having one of the transport units, first decompression means for decompressing each of the transport chambers to keep its internal atmospheric pressure lower than the external atmospheric pressure of the cleaning device by 0 through 0.02 mmH.sub.2 O, and second decompression means for decompressing each of the cleaning chambers to keep its internal atmospheric pressure lower than the internal atmospheric pressure of each of the transport chambers by 0 through 0.02 mmH.sub.2 O.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.