Yoshio Kumagai
8Patents
7h-index
10Co-inventors
60Inventor score
Filing activity: Apr 18, 1979 → May 15, 2001
Most-cited inventions
| Patent | Title | Area | Cited by | Status |
|---|---|---|---|---|
| US5015330A | Film forming method and film forming device | Emerging Cross-Sectional Technologies | 105 | Expired |
| US5845660A | Substrate washing and drying apparatus, substrate washing method, and substrate washing apparatus | Emerging Cross-Sectional Technologies | 48 | Expired |
| US6001191A | Substrate washing method, substrate washing-drying method, substrate washing apparatus and substrate washing-drying apparatus | Emerging Cross-Sectional Technologies | 41 | Expired |
| US5873177A | Spin dryer and substrate drying method | Electricity | 22 | Expired |
| US5236515A | Cleaning device | Emerging Cross-Sectional Technologies | 19 | Expired |
| US6620260B2 | Substrate rinsing and drying method | Emerging Cross-Sectional Technologies | 18 | Expired |
| US5188136A | Cleaning device | Emerging Cross-Sectional Technologies | 14 | Expired |
| US4272964A | Steam generating apparatus | Mechanical Engineering; Lighting; Heating | 2 | Expired |
Source: USPTO / EPO open patent data. Inventor disambiguation is heuristic; counts are objective bibliographic measures.