Cantilever for use in atomic force microscope and manufacturing method therefor
US5193385A · kind A · utility
Assignee
Inventors
Key dates
| Filing date | Apr 16, 1991 |
| Grant date | Mar 16, 1993 |
| Priority date | — |
| Expiry date | Apr 16, 2011 |
Classification
- Technology area (CPC Y)Emerging Cross-Sectional Technologies
- CPC primaryY10S977/879
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
A cantilever for an atomic force microscope includes a diamond stylus for opposing a sample for detecting an atomic force, a stylus holding element, at least a portion of which is made of a magnetic material, holding the diamond stylus, and a lever having a secured end and a free end to which the stylus holding element is fastened for being deformed in response to an atomic force acting between the diamond stylus and the sample. A method of manufacturing a cantilever for an atomic force microscope comprises securing a rough diamond stylus to a stylus holding element, at least a portion of the element being magnetic, forming a stylus by grinding the rough diamond, magnetizing the magnetic stylus holding element, applying an adhesive to the surface of a lever, securing the stylus holding element to the lever with the adhesive therebetween with a magnetic field in the vicinity of the lever, removing the magnetic field from the lever after the adhesive has hardened, and demagnetizing the stylus holding element.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.