Processing method and apparatus
US5203958A · kind A · utility
39Cited by
4References
24Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Jul 24, 1991 |
| Grant date | Apr 20, 1993 |
| Priority date | — |
| Expiry date | Jul 24, 2011 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH01L21/67109
- WIPO fieldSemiconductors
- WIPO sectorElectrical engineering
Abstract
A processing method includes the steps of placing an object to be processed on a susceptor arranged in a hermetic container, preliminarily introducing a small amount of heat transfer medium gas to a gap between the object to be processed and the susceptor while evacuating the gap, introducing the heat transfer medium gas to the gap until a pressure thereof reaches a predetermined value while controlling the pressure thereof by controlling an evacuation amount from the gap, and processing the object to be processed.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.