Method for delivering an involatile reagent in vapor form to a CVD reactor
US5204314A · kind A · utility
Assignee
Inventors
Key dates
| Filing date | Dec 13, 1991 |
| Grant date | Apr 20, 1993 |
| Priority date | — |
| Expiry date | Dec 13, 2011 |
Classification
- Technology area (CPC Y)Emerging Cross-Sectional Technologies
- CPC primaryY10S505/734
- WIPO fieldSurface technology, coating
- WIPO sectorChemistry
Abstract
A process and apparatus for delivering an involatile reagent in gaseous form, wherein an involatile reagent source liquid is flash vaporized on a vaporization matrix structure at elevated temperature. A carrier gas may be flowed past the flash vaporization matrix structure to yield a carrier gas mixture containing the flash vaporized source reagent. The matrix structure preferably has a high surface-to-volume ratio, and may suitably com PAC GOVERNMENT RIGHTS IN INVENTION This invention was made with Government support under Contract No. N00014 88-0531 awarded by the Defense Advanced Projects Research Administration (DARPA). The Government has certain rights in this invention.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.