Robin A. Gardiner
18Patents
14h-index
21Co-inventors
78Inventor score
Filing activity: Sep 12, 1990 → Nov 8, 2017
Most-cited inventions
| Patent | Title | Area | Cited by | Status |
|---|---|---|---|---|
| US5362328A | Apparatus and method for delivering reagents in vapor form to a CVD reactor, incorporating a cleaning subsystem | Emerging Cross-Sectional Technologies | 347 | Expired |
| US5204314A | Method for delivering an involatile reagent in vapor form to a CVD reactor | Emerging Cross-Sectional Technologies | 252 | Expired |
| US5453494A | Metal complex source reagents for MOCVD | Electricity | 196 | Expired |
| US5536323A | Apparatus for flash vaporization delivery of reagents | Emerging Cross-Sectional Technologies | 193 | Expired |
| US5840897A | Metal complex source reagents for chemical vapor deposition | Electricity | 190 | Expired |
| US6110529A | Method of forming metal films on a substrate by chemical vapor deposition | Electricity | 188 | Expired |
| US5711816A | Source reagent liquid delivery apparatus, and chemical vapor deposition system comprising same | Emerging Cross-Sectional Technologies | 179 | Expired |
| US5820664A | Precursor compositions for chemical vapor deposition, and ligand exchange resistant metal-organic precursor solutions comprising same | Emerging Cross-Sectional Technologies | 159 | Expired |
| US5225561A | Source reagent compounds for MOCVD of refractory films containing group IIA elements | Electricity | 124 | Expired |
| US5705443A | Etching method for refractory materials | Electricity | 104 | Expired |
| US5280012A | Method of forming a superconducting oxide layer by MOCVD | Emerging Cross-Sectional Technologies | 101 | Expired |
| US5919522A | Growth of BaSrTiO.sub.3 using polyamine-based precursors | Chemistry; Metallurgy | 84 | Expired |
| US6126996A | Metal complex source reagents for chemical vapor deposition | Electricity | 50 | Expired |
| US7323581B1 | Source reagent compositions and method for forming metal films on a substrate by chemical vapor deposition | Chemistry; Metallurgy | 32 | Expired |
| US5337651A | Apparatus and method for protection of pumps used for delivery of air- or moisture-sensitive liquids | Emerging Cross-Sectional Technologies | 6 | Expired |
| US5431957A | Apparatus and method for protection of pumps used for delivery of air- or moisture-sensitive liquids | Emerging Cross-Sectional Technologies | 4 | Expired |
| US8299286B2 | Source reagent compositions and method for forming metal films on a substrate by chemical vapor deposition | Chemistry; Metallurgy | 2 | Active |
| US11027974B2 | Removal of moisture from hydrazine | Chemistry; Metallurgy | 0 | Active |
Source: USPTO / EPO open patent data. Inventor disambiguation is heuristic; counts are objective bibliographic measures.