Inventor · Bethel, CT, US

Robin A. Gardiner

18Patents
14h-index
21Co-inventors
78Inventor score

Filing activity: Sep 12, 1990 → Nov 8, 2017

Most-cited inventions

PatentTitleAreaCited byStatus
US5362328A Apparatus and method for delivering reagents in vapor form to a CVD reactor, incorporating a cleaning subsystem Emerging Cross-Sectional Technologies 347 Expired
US5204314A Method for delivering an involatile reagent in vapor form to a CVD reactor Emerging Cross-Sectional Technologies 252 Expired
US5453494A Metal complex source reagents for MOCVD Electricity 196 Expired
US5536323A Apparatus for flash vaporization delivery of reagents Emerging Cross-Sectional Technologies 193 Expired
US5840897A Metal complex source reagents for chemical vapor deposition Electricity 190 Expired
US6110529A Method of forming metal films on a substrate by chemical vapor deposition Electricity 188 Expired
US5711816A Source reagent liquid delivery apparatus, and chemical vapor deposition system comprising same Emerging Cross-Sectional Technologies 179 Expired
US5820664A Precursor compositions for chemical vapor deposition, and ligand exchange resistant metal-organic precursor solutions comprising same Emerging Cross-Sectional Technologies 159 Expired
US5225561A Source reagent compounds for MOCVD of refractory films containing group IIA elements Electricity 124 Expired
US5705443A Etching method for refractory materials Electricity 104 Expired
US5280012A Method of forming a superconducting oxide layer by MOCVD Emerging Cross-Sectional Technologies 101 Expired
US5919522A Growth of BaSrTiO.sub.3 using polyamine-based precursors Chemistry; Metallurgy 84 Expired
US6126996A Metal complex source reagents for chemical vapor deposition Electricity 50 Expired
US7323581B1 Source reagent compositions and method for forming metal films on a substrate by chemical vapor deposition Chemistry; Metallurgy 32 Expired
US5337651A Apparatus and method for protection of pumps used for delivery of air- or moisture-sensitive liquids Emerging Cross-Sectional Technologies 6 Expired
US5431957A Apparatus and method for protection of pumps used for delivery of air- or moisture-sensitive liquids Emerging Cross-Sectional Technologies 4 Expired
US8299286B2 Source reagent compositions and method for forming metal films on a substrate by chemical vapor deposition Chemistry; Metallurgy 2 Active
US11027974B2 Removal of moisture from hydrazine Chemistry; Metallurgy 0 Active

Source: USPTO / EPO open patent data. Inventor disambiguation is heuristic; counts are objective bibliographic measures.