Microvalve of multilayer silicon construction

US5216273A · kind A · utility

Assignee

• Robert Bosch GmbH · DE

Inventors

• Christian Doering · Stuttgart, DE
• Thomas Grauer · Stuttgart, DE
• Michael Mettner · Ludwigsburg, DE
• Armin Schuelke · Schwieberdingen, DE
• Jiri Marek · Reutlingen, DE
• Hans-Peter Trah · Reutlingen, DE
• Joerg Muchow · Reutlingen, DE
• Martin Willmann · Reutlingen, DE

Key dates

• Filing date: Sep 19, 1991
• Grant date: Jun 1, 1993
• Expiry date: Sep 19, 2011

Classification

• Technology area (CPC F): Mechanical Engineering; Lighting; Heating
• CPC primary: F16K2099/008
• WIPO field: Mechanical elements
• WIPO sector: Mechanical engineering

Abstract

A microwave is made of a stack of layers. A sculptured silicon substrate is held between two covers each consisting of one or more layers. The inlet and the outlet of the microvalve are formed by perforations in the respective covers. A central valve plate is sculptured out of the silicon substrate with surfaces respectively facing the two covers in the region of the inlet and outlet in a symmetrical fashion. The valve plate is connected to the outer frame portion of the silicon substrate by one or more silicon strips. The valve plate is also shaped as a closure member near the inlet and/or the outlet. Electrodes are provided on the covers opposite the valve plate so that the valve can be electrostatically actuated with the valve plate serving as counterelectrode for these electrodes on the covers.