Martin Willmann
8Patents
7h-index
29Co-inventors
55Inventor score
Filing activity: Sep 19, 1991 → Mar 9, 1998
Most-cited inventions
| Patent | Title | Area | Cited by | Status |
|---|---|---|---|---|
| US5216273A | Microvalve of multilayer silicon construction | Mechanical Engineering; Lighting; Heating | 66 | Expired |
| US5273939A | Method of assembling micromechanical sensors | Electricity | 46 | Expired |
| US5310450A | Method of making an acceleration sensor | Emerging Cross-Sectional Technologies | 22 | Expired |
| US5542558A | Method for manufacturing micro-mechanical components using selective anodization of silicon | Emerging Cross-Sectional Technologies | 21 | Expired |
| US5324410A | Device for one-sided etching of a semiconductor wafer | Electricity | 21 | Expired |
| US5461917A | Acceleration sensor | Physics | 14 | Expired |
| US5355569A | Method of making sensor | Emerging Cross-Sectional Technologies | 8 | Expired |
| US6101872A | Sensor having a thin film element | Physics | 3 | Expired |
Source: USPTO / EPO open patent data. Inventor disambiguation is heuristic; counts are objective bibliographic measures.