Image reversal negative working o-quinone diazide and cross-linking compound containing photoresist process with thermal curing treatment and element produced therefrom
US5217840A · kind A · utility
4Cited by
33References
22Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | May 25, 1990 |
| Grant date | Jun 8, 1993 |
| Priority date | — |
| Expiry date | May 25, 2010 |
Classification
- Technology area (CPC Y)Emerging Cross-Sectional Technologies
- CPC primaryY10S430/168
- WIPO fieldOptics
- WIPO sectorInstruments
Abstract
A process for converting a normally positive working photosensitive composition to a negative working composition. One forms a composition containing an alkali soluble resin, a 1,2 quinone diazide-4-sulfonyl compound and an acid catalyzed crosslinker in a solvent mixture. After drying and imagewise exposing, the composition is baked and developed to produce a negative image.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.