Graphite columnar heating body for semiconductor wafer heating
US5233163A · kind A · utility
Assignee
Inventors
Key dates
| Filing date | Jul 3, 1991 |
| Grant date | Aug 3, 1993 |
| Priority date | — |
| Expiry date | Jul 3, 2011 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH01L21/67103
- WIPO fieldSemiconductors
- WIPO sectorElectrical engineering
Abstract
A heating apparatus for use in heating a substrate comprises an electric heater and a power supply part. The electric heater is made up of an approximately columnar body which is made of graphite, and this columnar body has a top with a flat surface part on which the substrate is placed and a pair of legs which extend downwardly from the flat surface part. The legs are defined by an opening in the columnar body. The power supplying part is coupled to the electric heater and supplies a voltage across the legs of the columnar body so that a current flows from one leg to the other, thereby generating heat at the flat surface part to heat the substrate.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.