Precision electrostatic lens system and method of manufacture
US5241182A · kind A · utility
23Cited by
6References
34Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Nov 25, 1992 |
| Grant date | Aug 31, 1993 |
| Priority date | — |
| Expiry date | Nov 25, 2012 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH01J2237/12
- WIPO fieldElectrical machinery, apparatus, energy
- WIPO sectorElectrical engineering
Abstract
A precision electrostatic lens system is formed from lens electrodes having high precision inner bores by aligning said bores on a ceramic rod, inserting segmented glass spacers between adjacent electrodes, and brazing the combination together to provide a monolithic structure capable of maintaining accurate tolerances.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.