Patent · US Expired

Atomic force microscope for small samples having dual-mode operating capability

US5253516A · kind A · utility

30Cited by
10References
7Claims
0Family size

Assignee

Inventors

Key dates

Filing dateMay 7, 1992
Grant dateOct 19, 1993
Priority date
Expiry dateMay 7, 2012

Classification

  • Technology area (CPC Y)Emerging Cross-Sectional Technologies
  • CPC primaryY10S977/852
  • WIPO fieldMeasurement
  • WIPO sectorInstruments

Abstract

This invention is a dual mode atomic force microscope which has significant advantages for small samples. The major point of novelty of this device is the provision for mounting samples onto the deflection mechanism, thereby allowing the tip to be separately mounted. The invention therefore allows for increased flexibility in the design of the tip, which can improve the performance of the microscope. The main configuration and several tip designs and variations of the deflection mechanism and the sample holder are described. Also, methods for using a microscope of this type are presented. The invention primarily consists of an AFM where the sample is mounted on the cantilever arm, and the tip is mounted separately, not on the cantilever arm. The cantilever arm and sample are scanned relative to the sample either by moving the sample or by moving the tip. Dual mode operation is achieved by combining cantilever arm deflection measurement by optical means with, for example, detection of a current between the tip and sample.

Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.