Washing apparatus
US5261431A · kind A · utility
26Cited by
5References
11Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Apr 2, 1992 |
| Grant date | Nov 16, 1993 |
| Priority date | — |
| Expiry date | Apr 2, 2012 |
Classification
- Technology area (CPC Y)Emerging Cross-Sectional Technologies
- CPC primaryY10S134/902
- WIPO fieldSemiconductors
- WIPO sectorElectrical engineering
Abstract
A washing apparatus includes plural washing vessels each containing a solution for cleaning or washing wafers, a boat housed in each washing vessel to support the wafers and immersed together with the wafers in the chemical solution, and a carrier for carrying the wafers into and out of its corresponding washing vessel. The carrier has a fork for supporting the wafers and loading and unloading them to and from the boat. It further has nozzles for washing and drying the fork.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.