Kinya Ueno
20Patents
13h-index
17Co-inventors
78Inventor score
Filing activity: Nov 15, 1976 → Jun 25, 2003
Most-cited inventions
| Patent | Title | Area | Cited by | Status |
|---|---|---|---|---|
| US5882433A | Spin cleaning method | Performing Operations; Transporting | 179 | Expired |
| US5940985A | Apparatus and method for drying substrates | Electricity | 83 | Expired |
| US6001191A | Substrate washing method, substrate washing-drying method, substrate washing apparatus and substrate washing-drying apparatus | Emerging Cross-Sectional Technologies | 41 | Expired |
| US5421905A | Method for washing wafers | Emerging Cross-Sectional Technologies | 37 | Expired |
| US6299696A | Substrate processing apparatus and substrate processing method | Emerging Cross-Sectional Technologies | 30 | Expired |
| US6131588A | Apparatus for and method of cleaning object to be processed | Emerging Cross-Sectional Technologies | 29 | Expired |
| US6050275A | Apparatus for and method of cleaning objects to be processed | Emerging Cross-Sectional Technologies | 27 | Expired |
| US5261431A | Washing apparatus | Emerging Cross-Sectional Technologies | 26 | Expired |
| US6045624A | Apparatus for and method of cleaning objects to be processed | Emerging Cross-Sectional Technologies | 24 | Expired |
| US4106449A | EGR system | Mechanical Engineering; Lighting; Heating | 24 | Expired |
| US5236515A | Cleaning device | Emerging Cross-Sectional Technologies | 19 | Expired |
| US6342104B1 | Method of cleaning objects to be processed | Emerging Cross-Sectional Technologies | 18 | Expired |
| US6746543B2 | Apparatus for and method of cleaning objects to be processed | Emerging Cross-Sectional Technologies | 13 | Expired |
| US6613692B1 | Substrate processing method and apparatus | Emerging Cross-Sectional Technologies | 12 | Expired |
| US6413355B1 | Apparatus for and method of cleaning objects to be processed | Electricity | 11 | Expired |
| US6554010B1 | Substrate cleaning tool, having permeable cleaning head | Emerging Cross-Sectional Technologies | 11 | Expired |
| US6319329A | Method of cleaning objects to be processed | Emerging Cross-Sectional Technologies | 10 | Expired |
| US6394110B2 | Substrate processing apparatus and substrate processing method | Emerging Cross-Sectional Technologies | 9 | Expired |
| US6491045B2 | Apparatus for and method of cleaning object to be processed | Emerging Cross-Sectional Technologies | 5 | Expired |
| US7191785B2 | Substrate processing apparatus for resist film removal | Emerging Cross-Sectional Technologies | 2 | Expired |
Source: USPTO / EPO open patent data. Inventor disambiguation is heuristic; counts are objective bibliographic measures.