Liquid supply apparatus
US5275658A · kind A · utility
Assignees
Inventor
Key dates
| Filing date | Dec 10, 1992 |
| Grant date | Jan 4, 1994 |
| Priority date | — |
| Expiry date | Dec 10, 2012 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG03F7/3021
- WIPO fieldOptics
- WIPO sectorInstruments
Abstract
A developer-supply apparatus has a developer-liquid supply nozzle, a spin chuck for supporting a wafer, and a holder for allowing the supply nozzle to wait there. The supply nozzle is transferred between a position above the chuck and a waiting position on the holder. The supply nozzle has a nozzle tip with a plurality of through holes communicating with a space containing a developer liquid. A U-shaped conduit extending along the line of the through holes is provided in the holder, for removing drops of the developer liquid hanging from the nozzle tip. The conduit has a bottom provided with a plurality of through holes for exhausting the developer liquid.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.