Yoshio Kimura
94Patents
21h-index
132Co-inventors
91Inventor score
Filing activity: Aug 23, 1973 → Aug 18, 2016
Most-cited inventions
| Patent | Title | Area | Cited by | Status |
|---|---|---|---|---|
| US5826129A | Substrate processing system | Electricity | 472 | Expired |
| US6439822B1 | Substrate processing apparatus and substrate processing method | Emerging Cross-Sectional Technologies | 462 | Expired |
| US5061144A | Resist process apparatus | Emerging Cross-Sectional Technologies | 139 | Expired |
| US5964309A | Power supply system, electric vehicle with power supply system mounted thereon, and method of regulating amount of fuel supply | Emerging Cross-Sectional Technologies | 89 | Expired |
| US5374312A | Liquid coating system | Emerging Cross-Sectional Technologies | 74 | Expired |
| US5002008A | Coating apparatus and method for applying a liquid to a semiconductor wafer, including selecting a nozzle in a stand-by state | Performing Operations; Transporting | 67 | Expired |
| US6083289A | Pulverized coal carriability improver | Mechanical Engineering; Lighting; Heating | 62 | Expired |
| US5929594A | Fuel-cells system, electric vehicle with fuel-cells system, and method of controlling supply of electric power | Emerging Cross-Sectional Technologies | 59 | Expired |
| US6033475A | Resist processing apparatus | Physics | 59 | Expired |
| US4720085A | Vehicle suspension apparatus | Performing Operations; Transporting | 55 | Expired |
| US5089305A | Coating apparatus and method for applying a liquid to a semiconductor wafer including selecting a nozzle on a stand by state | Performing Operations; Transporting | 47 | Expired |
| US6444029B1 | Multistage spin type substrate processing system | Physics | 37 | Expired |
| US5578127A | System for applying process liquid | Emerging Cross-Sectional Technologies | 33 | Expired |
| US6161969A | Apparatus for processing a substrate | Emerging Cross-Sectional Technologies | 31 | Expired |
| US5711809A | Coating apparatus and method of controlling the same | Performing Operations; Transporting | 28 | Expired |
| US5275658A | Liquid supply apparatus | Physics | 27 | Expired |
| US6447184B2 | Method and apparatus for controlling a printing operation | Physics | 27 | Expired |
| US6427717B1 | Process solution supplying apparatus and fluid passageway opening-closing valve device for process solution supplying apparatus | Emerging Cross-Sectional Technologies | 24 | Expired |
| US7684064B2 | Print job authentication | Physics | 23 | Active |
| US5908657A | Coating apparatus and method of controlling the same | Performing Operations; Transporting | 23 | Expired |
| US6368776B1 | Treatment apparatus and treatment method | Electricity | 21 | Expired |
| US7241061B2 | Coating and developing system and coating and developing method | Electricity | 21 | Expired |
| US6015066A | Liquid supplying device | Emerging Cross-Sectional Technologies | 21 | Expired |
| US6593045B2 | Substrate processing apparatus and method | Emerging Cross-Sectional Technologies | 20 | Expired |
| US7281869B2 | Coating and developing system and coating and developing method | Electricity | 18 | Expired |
Source: USPTO / EPO open patent data. Inventor disambiguation is heuristic; counts are objective bibliographic measures.