Positioning device for scanning probe microscopes
US5306919A · kind A · utility
Assignee
Inventors
Key dates
| Filing date | Sep 21, 1992 |
| Grant date | Apr 26, 1994 |
| Priority date | — |
| Expiry date | Sep 21, 2012 |
Classification
- Technology area (CPC Y)Emerging Cross-Sectional Technologies
- CPC primaryY10S977/872
- WIPO fieldOptics
- WIPO sectorInstruments
Abstract
A two dimensional piezoelectric positioning device of the type including a thin walled cylindrical shaped member of piezoelectric material. A plurality of substantially rectangular shaped members are positioned around one surface of the cylindrical shaped member to form opposite pairs of electrodes to control the two dimensional movement in accordance with voltages applied to the pairs of electrodes. Each rectangular shaped member is split into at least two electrode portions and with particular polarity voltages applied to the individual electrode portions to maintain a substantially constant length for the cylindrical shaped member during the two dimensional movement.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.