Method of making an acceleration sensor

US5310450A · kind A · utility

Assignee

• Robert Bosch GmbH · DE

Inventors

• Michael Offenberg · Lörrach, DE
• Martin Willmann · Reutlingen, DE

Key dates

• Filing date: Jun 17, 1992
• Grant date: May 10, 1994
• Expiry date: Jun 17, 2012

Classification

• Technology area (CPC Y): Emerging Cross-Sectional Technologies
• CPC primary: Y10S148/159
• WIPO field: Measurement
• WIPO sector: Instruments

Abstract

A method of making acceleration sensors with integrated measurement of internal pressure includes connecting multiple plates to each other, thereby defining internal cavities. The tightness of these connections or bonds is checked and controlled during the manufacturing process. The plates define membrane portions adjacent each cavity, the membranes deforming in accordance with the internal pressure in the adjacent cavity. Preferably, the internal pressure of the sensor is measurable by detecting deformation of a sensor wall which defines a membrane.