Process for forming negative tone images of polyimides using base treatment of crosslinked polyamic ester
US5310625A · kind A · utility
11Cited by
19References
4Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Aug 3, 1993 |
| Grant date | May 10, 1994 |
| Priority date | — |
| Expiry date | Aug 3, 2013 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG03F7/40
- WIPO fieldMacromolecular chemistry, polymers
- WIPO sectorChemistry
Abstract
The present invention relates to an improved process for forming negative tone images of photosensitive polyimides on a substrate having improved wall angles.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.